Fabrication of 3D Micro Structure using Excimer Laser
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 90 === This study applies excimer laser micro-machining technology for manufacturing 3D axially symmetrical micro-structures. It is based on a work-piece rotation or mask rotation method in conjunction with the unique capabilities of an excimer laser micro-machining...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qm8r23 |