Growth and Characterization of TiNiCu Alloy Thin Films
碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 90 === Deposition of TiNiCu-based thin films was performed using a dc sputter deposition technique. The target composition was varied such that a series of TiNiCu thin films with various compositions was obtained. The relationship among film composition, deposit...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/4a4nst |