Growth of Nanocrystalline Diamond Films by Hot Filament Chemical Vapor Deposition Using CCl4/H2 Gases
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 90 === Abstract The growth characteristics of the nanodiamond films deposited using CCl4/H2 in a hot-filament chemical vapor deposition reactor were investigated in this study. Film growth was studied under the following conditions: filament temperature, concentra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3cd3yn |