Deposition of Diamond-Like Carbon Nanocomposite Films by Inductively-Coupled-Plasma System

• Main Authors: Tzu-Ping Lin, 林子平
• Other Authors: Jih-Jen Wu
• Format: Others
• Language: zh-TW
• Published: 2002
• Online Access: http://ndltd.ncl.edu.tw/handle/v224ax

碩士 === 國立成功大學 === 化學工程學系碩博士班 === 90 === Diamond-Like Carbon (DLC) films that are like diamond exhibit excellent characteristics, such as high hardness, low friction coefficient, smooth surface, high heat conductivity, and chemical erosion resistivity. It is always applied on wear, mechanic properties etc. According to the growth mechanism of DLC, the ion energy influences the properties of film. So, DLC films have high compressive stress. Therefore, it is difficult to deposit high quality DLC films. In this study, we used hexamethyldisilazane (HMDSN), hexamethyldisiloxane (HMDSO), and hexamethyldisilane (HMDS) as carbon source, that ionized by inductively-coupled-plasma (ICP). Pulsed substrate bias independently controlled the incident energy of ions. For analysis, we use scanning electron microscopy (SEM) and X-ray photoemission spectroscopy (XPS) to measure film thickness and bonding energy, respectively. Raman spectroscopy was used to characterize the structure and the microstructure was analyzed by tunneling electron microscope (TEM). The surface tension was measured by contact angle and optical band-gap was analyzed by UV-Vis spectroscopy. From analysis of TEM, it shows that nanoparticles are imbedded in DLC films depositing by HMDSN, HMDSO and HMDS. The nanoparticles are varied with different source. The composition of nanoparticles was analyzed by electron dispersive spectroscopy (EDS), and structure was characterized by selected area diffraction (SAD) pattern. The results of analysis show that DLC nanocomposite films can be useful to deposit thicker films by organometallic compounds like Si-C-N, Si-C-O and Si-C. Its surface energy is less than DLC films depositing by CH4, and shows hydrophilic feature.