Deposition of Diamond-Like Carbon Nanocomposite Films by Inductively-Coupled-Plasma System
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 90 === Diamond-Like Carbon (DLC) films that are like diamond exhibit excellent characteristics, such as high hardness, low friction coefficient, smooth surface, high heat conductivity, and chemical erosion resistivity. It is always applied on wear, mechanic propertie...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2002
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Online Access: | http://ndltd.ncl.edu.tw/handle/v224ax |