A study of Zn and In oxided film gas sensor doped with precious metal.
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 90 === Abstract The gas sensors consist of a thin film deposited on an electrical insulated substrate, which is sensitive to some gases. Because of the interaction of adsorbed gas with sensor, the sensor electrical properties change, and the change can be detected. I...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30271326288521191610 |