Study on the Etching Characteristics of Nitrogen-Doped Cobalt Silicide
碩士 === 國立中興大學 === 電機工程學系 === 90 === A cantilever beam is widely employed in actuator device including support posts, hinges, and cantilevers (actuators). Hinge characteristics play an important role in actuator reliability and lifetime. In this study, nitrogen-doped cobalt silicide film...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75712909554935478957 |