A study of ultraviolet annealing of AZO transparent conductive film prepared by IAD (ion source assisted deposition) reactive vapor deposition

碩士 === 輔仁大學 === 物理學系 === 90 ===

Bibliographic Details
Main Author: 余祐安
Other Authors: 凌國基
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/21619874231460846044