Copper Interconnection Fabricated by Displacement Technology For ULSI
碩士 === 逢甲大學 === 電子工程所 === 90 === Copper interconnection is one of the key technologies in the filed of Ultra-Large-Scale integrated（ULSI）circuits for the next generation . Since Al is soft and can not suffer large amount of current density, recently, copper has become the most hot material to repla...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/u6gwv9 |