Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio

碩士 === 逢甲大學 === 材料科學所 === 90 === Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface rough...

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Main Authors: Hsiu-Hsien Hsiao, 蕭修賢
Other Authors: Sham-Tsong Shiue
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/7pf6hp
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spelling ndltd-TW-090FCU051590042018-05-10T04:22:14Z http://ndltd.ncl.edu.tw/handle/7pf6hp Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio 以電漿輔助化學氣相沈積法研製碳鍍層光纖:氫氣/甲烷混合比的效應 Hsiu-Hsien Hsiao 蕭修賢 碩士 逢甲大學 材料科學所 90 Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface roughness of carbon coatings were determined by Laser Raman Spectrometry and atom force microscopy, respectively. Then, the tensile strengths of carbon-coated optical fibers were measured by the tensile machine. Finally, carbon-coated optical fibers were immersed in the liquid nitrogen for one day and stress induced cracks on the surface of carbon coatings were observed using the optical microscope. As a result, because of the increase of hydrogen/methane ratio, the effect of hydrogen etching advantaged the growth of diamond-like phase and decreased the surface roughness of carbon coatings. Alternatively, the tensile strength increased with hydrogen/methane ratio increased, but the density of stressed cracks decreased with hydrogen/methane ratio increased. From this experiment, we also found the changes of the density of stressed cracks and tensile strength were effected by structures and surface roughness of carbon coatings. Sham-Tsong Shiue 薛顯宗 2002 學位論文 ; thesis 71 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 逢甲大學 === 材料科學所 === 90 === Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface roughness of carbon coatings were determined by Laser Raman Spectrometry and atom force microscopy, respectively. Then, the tensile strengths of carbon-coated optical fibers were measured by the tensile machine. Finally, carbon-coated optical fibers were immersed in the liquid nitrogen for one day and stress induced cracks on the surface of carbon coatings were observed using the optical microscope. As a result, because of the increase of hydrogen/methane ratio, the effect of hydrogen etching advantaged the growth of diamond-like phase and decreased the surface roughness of carbon coatings. Alternatively, the tensile strength increased with hydrogen/methane ratio increased, but the density of stressed cracks decreased with hydrogen/methane ratio increased. From this experiment, we also found the changes of the density of stressed cracks and tensile strength were effected by structures and surface roughness of carbon coatings.
author2 Sham-Tsong Shiue
author_facet Sham-Tsong Shiue
Hsiu-Hsien Hsiao
蕭修賢
author Hsiu-Hsien Hsiao
蕭修賢
spellingShingle Hsiu-Hsien Hsiao
蕭修賢
Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
author_sort Hsiu-Hsien Hsiao
title Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
title_short Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
title_full Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
title_fullStr Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
title_full_unstemmed Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
title_sort carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
publishDate 2002
url http://ndltd.ncl.edu.tw/handle/7pf6hp
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