Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
碩士 === 逢甲大學 === 材料科學所 === 90 === Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface rough...
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ndltd-TW-090FCU051590042018-05-10T04:22:14Z http://ndltd.ncl.edu.tw/handle/7pf6hp Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio 以電漿輔助化學氣相沈積法研製碳鍍層光纖:氫氣/甲烷混合比的效應 Hsiu-Hsien Hsiao 蕭修賢 碩士 逢甲大學 材料科學所 90 Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface roughness of carbon coatings were determined by Laser Raman Spectrometry and atom force microscopy, respectively. Then, the tensile strengths of carbon-coated optical fibers were measured by the tensile machine. Finally, carbon-coated optical fibers were immersed in the liquid nitrogen for one day and stress induced cracks on the surface of carbon coatings were observed using the optical microscope. As a result, because of the increase of hydrogen/methane ratio, the effect of hydrogen etching advantaged the growth of diamond-like phase and decreased the surface roughness of carbon coatings. Alternatively, the tensile strength increased with hydrogen/methane ratio increased, but the density of stressed cracks decreased with hydrogen/methane ratio increased. From this experiment, we also found the changes of the density of stressed cracks and tensile strength were effected by structures and surface roughness of carbon coatings. Sham-Tsong Shiue 薛顯宗 2002 學位論文 ; thesis 71 zh-TW |
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碩士 === 逢甲大學 === 材料科學所 === 90 ===
Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface roughness of carbon coatings were determined by Laser Raman Spectrometry and atom force microscopy, respectively. Then, the tensile strengths of carbon-coated optical fibers were measured by the tensile machine. Finally, carbon-coated optical fibers were immersed in the liquid nitrogen for one day and stress induced cracks on the surface of carbon coatings were observed using the optical microscope. As a result, because of the increase of hydrogen/methane ratio, the effect of hydrogen etching advantaged the growth of diamond-like phase and decreased the surface roughness of carbon coatings. Alternatively, the tensile strength increased with hydrogen/methane ratio increased, but the density of stressed cracks decreased with hydrogen/methane ratio increased. From this experiment, we also found the changes of the density of stressed cracks and tensile strength were effected by structures and surface roughness of carbon coatings.
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author2 |
Sham-Tsong Shiue |
author_facet |
Sham-Tsong Shiue Hsiu-Hsien Hsiao 蕭修賢 |
author |
Hsiu-Hsien Hsiao 蕭修賢 |
spellingShingle |
Hsiu-Hsien Hsiao 蕭修賢 Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
author_sort |
Hsiu-Hsien Hsiao |
title |
Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
title_short |
Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
title_full |
Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
title_fullStr |
Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
title_full_unstemmed |
Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
title_sort |
carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio |
publishDate |
2002 |
url |
http://ndltd.ncl.edu.tw/handle/7pf6hp |
work_keys_str_mv |
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