Carbon-coated optical fibers prepared by plasma enhanced chemical vapor deposition method:effect of hydrogen/methane ratio
碩士 === 逢甲大學 === 材料科學所 === 90 === Hermetically carbon-coated optical fibers were prepared by Plasma enhanced chemical vapor deposition. The effect of hydrogen/methane ration on properties of carbon coatings with thickness 100 nm was researched. During the experiment, the structures and surface rough...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/7pf6hp |