The Capacitive Mechanical Microsensors Using MPMC Process
碩士 === 逢甲大學 === 自動控制工程所 === 90 === The multi-layer stacking capacitive microsensors are proposed based on silicon-based MEMS technology. The results of simulation, design and microfabrication are analyzed. Also the characteristics analysis of the capacitive microsensors are presented. The microsenso...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33957w |