The Study of IC Process Fault Detection
碩士 === 大葉大學 === 自動化工程研究所 === 90 === The evolution of semiconductor manufacturing process on the enlargement of wafer size together with the shrink of feature size results in the difficulty of process control. In addition，faulty processes relatively increase. Tight process control then bec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73157627741160982386 |