The Fabrication and Study of GaAs MOSFET Using Rare-Earth Oxide as Gate Dielectrics

碩士 === 中原大學 === 電子工程研究所 === 90 === The main goal of this thesis is to fabricate GaAs Metal Oxide Semiconductor Field Effect Transistors using rear-earth oxide as gate dielectrics and study the device characteristics. GaAs and related compound material system dominates the applications of modern...

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Bibliographic Details
Main Authors: Jiun-Jia Chen, 陳俊嘉
Other Authors: Hui-Ling Kao
Format: Others
Language:zh-TW
Published: 2002
Online Access:http://ndltd.ncl.edu.tw/handle/71413065567710080071