Study of the Effect of TiN Diffusion Barrier on the Electrical Properties of BST Capacitor used for High Density DRAM
碩士 === 長庚大學 === 化學工程研究所 === 90 === The objectives of this research are to prepare barium strontium titanate (BST) thin films by RF magnetron sputtering using sol-gel derived BST targets and to investigate the effect of sputtering power on the crystallization behavior and the dielectric ch...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2002
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35032735540354234847 |