Production Monitoring and Control System by Managing the Key Machines in a Wafer Fabrication Factory
碩士 === 元智大學 === 工業工程研究所 === 89 === The processes of wafer fabrication are complicated and have characters of re-entrant and rework. The lots will entry the same machine groups around 10 ~ 30 times and contains 400 ~ 600 steps. It’s process characters cause difficulties in production man...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64484265423100434782 |