Design and fabrication of the fringe capacitive sensor
碩士 === 國立雲林科技大學 === 機械工程系碩士班 === 89 === In this paper, one proximity sensor is fabricated by using the rapidly advanced solid-state technology. It works on the principle of the fringe capacitance, and the displacement from several micrometers to millimeters can be measured. For the fringe effect, on...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04775926164475226161 |