The Influence of Floor's Porosity and Height on Airflow Distribution in Cleanrooms
碩士 === 大同大學 === 機械工程研究所 === 89 === Contamination control is a key factor in assuring product reliability in many high technology industries. Because the contamination of submicron size particles can lead to a failure of production process. So, the efficiency of cleanliness is especially i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28423139013558635854 |