Theoretical and Numerical studies of Viscous Air Damping in Laterally Oscillating Micro Comb Structures
碩士 === 淡江大學 === 航空太空工程學系 === 89 === This paper studies analytically as well as numerically viscous air damping in laterally oscillating micro comb structures. The influences of dimension and frequency on viscous damping are investigated. The Knudsen numbers in typical micro comb structure...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2001
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Online Access: | http://ndltd.ncl.edu.tw/handle/11955024599651699443 |