Fabrication of Nano-tip Diamond-like Carbon Film Utilizing Plasma Sheath Potential Drop by MPCVD
碩士 === 國立臺北科技大學 === 光電技術研究所 === 89 === Because diamond-like carbon (DLC) film has better field emission properties than diamond film, and extraordinary electron tunneling effect from tip, it has been widely studied in the field of field-emission devices. Microwave plasma chemical vapor deposition (M...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43821693948475225911 |