Parametrical Studies for Mini-Environment Design
碩士 === 國立臺北科技大學 === 電機工程系碩士班 === 89 === Following the increasing precision technology of semiconductor manufacturing processes, the requirement of process environment is becoming even strict. The uni-directional laminar ballroom type cleanroom is not able to fulfill such requirement. The adoption of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56753048184643295319 |