Growth and mechanical properties of BCN thin films
碩士 === 國立臺灣科技大學 === 機械工程系 === 89 === Boron carbon nitride (BCN) thin films were deposited on Si (100) substrates by dual-gun magnetron sputtering from graphite and h-BN targets in Ar ambient gas of a constant of 3.5 mTorr. Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) were use...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32324471217950060098 |