The Synthesis of MOCVD Precursor (tBuN)Ta(NEt2)3 and The Effects of Carrier Gases on the Growth of Tantalum Nitride Thin Films
碩士 === 國立臺灣科技大學 === 化學工程系 === 89 === A tantalum complexes (tBuN=)TaCl3Py2 was synthesized by reacting TaCl5 with Me3SiNHtBu in toluene. Then (tBuN=)Ta(NEt2)3 was successfully synthesized by reacting (tBuN)TaCl3Py2 with LiNEt2 in hexane. These complexes were identified by 1H-NMR, 13C-NMR a...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75511669905124664415 |