The Synthesis of MOCVD Precursor (hfac)Cu(COD) and the Initial Growth of Copper Thin Films
碩士 === 國立臺灣科技大學 === 化學工程系 === 89 === The volatile copper(I) complex (β-diketonate)CuI(COD) whereβ-diketonate = hexafluoroacetylacetonate(hfac), and COD = 1, 5-clcyooctandine has been successfully prepared in high yield. This species has been characterized by H1-NMR and FTIR to ensure its...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81018319076126449527 |