A Methodology of Operation Scheduling for Cluster Tools in Semiconductor Manufacturing
碩士 === 國立臺灣大學 === 工業工程學研究所 === 89 === Because less contamination, shorter cycle times, and the flexibility of changeover, cluster tools play an important role in modern fabs. How to evaluate the capacity of cluster tools accurately and how to improve their throughput efficiently are two key issues o...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17280502756250134955 |