Analysis of Sheath Dynamics and Application in Plasma Immersion Ion Implantation
博士 === 國立清華大學 === 物理學系 === 89 === The main purpose of the paper is to develop the technique of the plasma immersion ion implantation ( PIII ), and to study the sheath propagation in terms of the negative high voltage pulse on the target. A high-density inductively coupled plasma source and a high-vo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12207521789742372319 |