Thermal Evolution, Microstructure and Electrical Characteristics of Sol-Gel Derived BST Thin Film
碩士 === 國立清華大學 === 材料科學工程學系 === 89 === Abstract The BaxSr1-xTiO3 and Al-doped BST thin films were fabricated on Pt/TaN/SiO2/Si and Al2O3 substrates using sol-gel technique. The structure and thermal decomposition were investigated by means of thermogravimetric/differential therm...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70593650752251125979 |