Liquid Phase Deposition of TiO2 and BaTiO3 Thin Films on Si Substrate Using the Solution Prepared by Precipitate Powder of Hexafluorotitanic Acid and Barium Nitrate
碩士 === 國立中山大學 === 電機工程學系研究所 === 89 === ABSTRACT In recent years, there has been increasing demands for high dielectric materials to replace SiO2 for high-density dynamic random access memories with ultra large scale integration (ULSI). As the dimensions of the charge storage node decrease in high-d...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43689186407046568725 |