Research and Application of Process Control for Micro- Electro-Mechanical Systems
碩士 === 國立交通大學 === 機械工程系 === 89 === For some typical application issues of MEMS technology ,ArF excimer laser are adopted to fabricate the geometric patterns like the slight lines ,and slight arc etc. on the chosen membrane or plate . The present study develops a CAD/CAM system for assisti...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76378938074548096465 |