Modeling and Scheduling of 300 mm Cluster Tools Using a Petri-Net Approach
碩士 === 國立交通大學 === 機械工程系 === 89 === This paper is focused on the scheduling of the 300 mm cluster tool. We use a Petri Net approach to model the system, and use an A* algorithm to search the best schedule in reachability graph of Petri Net model of the system. In this paper, we introduce t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56284846050329965424 |