The Study of Polysilicon Oxide in Vertical Structure
碩士 === 國立交通大學 === 電子工程系 === 89 === In this thesis, we propose a novel vertical structure concept, which the channel length is controlled by thickness of polysilicon films instead of the photolithographic limitation. Hence, the investigation of thin gate oxide quality on vertical structure...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32922863963706022925 |