Development and Process Simulation of A Novel Technology for Using Air as ULSI Dielectric and Integration Feasibility Illumination
博士 === 國立交通大學 === 電子工程系 === 89 === This thesis studies how to use air as dielectric material in ULSI. It includes the process flow of air gap, consideration of related process parameter, consideration about compatibility with existed process, electrical characteristics extracted from test pattern, c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86103181184858690753 |