The Study of Titanium Tungsten Nitride and Tungsten Nitride Schottky Contacts on n-GaN
碩士 === 國立交通大學 === 材料科學與工程系 === 89 === A comprehensive study of titanium tungsten nitride and tungsten nitride Schottky contacts on n-type GaN has been made. Both TiWNx and WNx film were deposited by reactive dc sputtering method, the electrical and physical characteristics of the Schottky...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36694481373790012698 |