Investigation of Liquid Phase Chemical-Enhanced Oxidation Technique for GaAs and Its Application
博士 === 國立成功大學 === 電機工程學系 === 89 === A new liquid phase chemical-enhanced oxidation (LPCEO) technique for gallium arsenide (GaAs) device applications has been proposed. Unlike the other oxidation technique, the oxide film can be grown at relatively high oxidation rate...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/xdfxz6 |