Growth and Characterization of Carbon Nanotubes
碩士 === 國立成功大學 === 化學工程學系 === 89 === Carbon nanotubes (CNTs) were grown by plasma enhanced chemical vapor deposition method (PECVD) by using Ni/Fe catalysts and H2/N2/CH4 reactants. These tubes were characterized by Raman, SEM, and TEM. Pulsed plasma heated up the substrate to 500~700 ℃ and reacted w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93752142775448317542 |