A Study on Fabrication of Non-spherical Refraction Microlens Array by Gray-scale Mask
碩士 === 國立中興大學 === 精密工程研究所 === 89 === In this thesis, the manufacturing processes of non-spherical refraction microlens array by gray-scale mask is investigated. Compare to the conventional multi-lithography manufacturing method, the gray-scale mask approach requires only a single step to fabricate a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43839159386404933222 |