Optimal Design and Characterization of a Nanometer Positioning Stage
碩士 === 國立中興大學 === 機械工程學系 === 89 === Along with the fast growing of semiconductor and precision-manufacturing industry, high precision and high performance devices are becoming more necessary. In which, the precision micro-positioning system is an essential role. Many researches had been focused on t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16054223226170288372 |