Effect of Heat Treatment on the Microstructure of BaTiO3-based Thin Films
碩士 === 國立中興大學 === 材料工程學研究所 === 89 === A series of BaTiO3 thin films, BaTiO3, BaSrTiO3 and Ba(Ti,Fe)O3, were prepared by ion beam sputtering deposition on silicon substrate. Annealing of the BaTiO3-based thin films at 800℃in air for 0.5hr, 1hr, 1.5hr was characterized by transmission elect...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91670048489928240086 |