Design and Fabrication of SiGe Complementary MOS Transistor

碩士 === 義守大學 === 電子工程學系 === 89 === In this thesis, we explore the application of Si/SiGe heterostructres for CMOS transistors operation. The design consists of a strained Si1-xGex quantum well (as the hole channel) and a strained Si quantum well (as the electron channel) on relaxed Si1-yGey well. A...

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Bibliographic Details
Main Authors: Heng-Ru Chen, 陳恒如
Other Authors: Pei-Wen Li
Format: Others
Language:zh-TW
Published: 2001
Online Access:http://ndltd.ncl.edu.tw/handle/81796166461680987908