Study on the Optical Paramaters and Thin Film''s Thickness by Polarization Modulation Spectroscopic Ellipsometer
碩士 === 逢甲大學 === 電子工程學系 === 89 === Spectroscopic ellipsometry is a well-known and powerful optical technique for obtaining the optical properties, such as dielectric functions and optical parameters of the bulk semiconductor and its thin films. Some related papers on this topic have been published....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30347364069748925231 |