Study on the Contact Resistance and Reliability for Semiconductor Metallization
碩士 === 逢甲大學 === 電子工程學系 === 89 === Two issues,〝Part I. Investigation of heat-treated ohmic contacts on p-GaN〞and〝Part II. Reliability of copper interconnects〞, were investigated and discussed in this thesis. Part I. Investigation of heat-treated ohmic contacts on p-GaN...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2001
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Online Access: | http://ndltd.ncl.edu.tw/handle/87290428990140482612 |