Design and Implememtation of Three-Axis Robot
碩士 === 大葉大學 === 機械工程研究所 === 89 === The objective of the research is to design and to implement a robot arm which can be used in the semi-conductor process. Generally, the requirements of the working enviroment of the semi-conductor process are very strict, such as in clean room or in a vocuum chamb...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61170752385014044411 |