Characterizations of Mg-doped GaN Thin Films Grown by MetalOrganic Chemical Vapor Deposition System
碩士 === 中原大學 === 電子工程研究所 === 89 === Abstract Until now, GaN and its related materials are the key issue for developing the blue-green devices. In this thesis , the investigation magnesium doped GaN films with various Cp2Mg flow rate and growth temperature was conducted in atmosp...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2001
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Online Access: | http://ndltd.ncl.edu.tw/handle/57433801587685335505 |