Application of Automated Material Handling System in Semiconductor Manufacturing
碩士 === 中原大學 === 工業工程研究所 === 89 === Automated material handling systems (AMHS) used in wafer fabrication plants include interbay and intrabay systems. Interbay system moves wafers between bays and consists of vehicle system, rail system, inventory system (called stocker), and cleanness control syste...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72979644282091115005 |