Simulation analysis of tandem Intebay material handling system for wafer fab

• Main Authors: Li Kuang Chung, 鍾禮光
• Other Authors: Ling Feng Hsieh
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/87013162094641777770

碩士 === 中華大學 === 工業工程與管理研究所 === 89 === Most of wafer fabrications handle the cassette by automated material handling system that can be categorized as Interbay and Intrabay system. An Interbay system is in charge of material handling between different bays. Because each bay contains similar pieces of facility, and each wafer must be processed in hundred of manufacturing process, that makes the material handling system more complicated. As wafer diameter migrates from 200mm to 300mm, the weight of 25 wafers with cassette is estimated to increase from 3.4kg to 7.8kg. The Automated Material Handling Systems(AMHS) provides reliability and efficient transportation. In general, wafer fabrication use the Overhead Hoist Vehicle(OHV) to handle the material flow between tunnels or bays. Most of Interbay AMHS construct single loop track in central aisle. In this paper the tandem configuration would be employed for construct an Interbay track. The advantage of tandem Interbay AMHS includes: less complicated vehicle dispatching, reducing congestion and conflict. Then stocker’s capacity balance in-loop would be proposed for OHV cassette pick-up rule. Finally the single loop and the Interbay AMHS, balance in-loop are simulated in this paper. The result shows that the Intebay AMHS with double load and balancing in-loop at increasing the throughput and reducing cycle time.