Simulation analysis of tandem Intebay material handling system for wafer fab
碩士 === 中華大學 === 工業工程與管理研究所 === 89 === Most of wafer fabrications handle the cassette by automated material handling system that can be categorized as Interbay and Intrabay system. An Interbay system is in charge of material handling between different bays. Because each bay contains similar pieces of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87013162094641777770 |