A Fundamental Research on ElectroChemical Mechanical Polishing (ECMP)
碩士 === 元智大學 === 機械工程研究所 === 88 === Most of domestic die/mold manufacturers use manual polishing during the final part of die production. It lowers their productivity and also increase production cost .To overcome the above mentioned difficulties, the main objective of this thesis is to perform a fun...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93932745746466042210 |