Gas Sensitivity of Tin Oxide Organic Films Prepared by Low Temperature PECVD
碩士 === 大同大學 === 材料工程研究所 === 88 === The development of chemical sensors is flourishing due to the environmental pollution detection and disaster-prevention. In this study, the sensor was fabricated by using PECVD process and Tetramethyltin and O2 as precusors ; further, SnOxC thin films we...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30198810429526636392 |