A Study of Application of Miniaturized Thermal Conductivity Detector in Gas Concentration Determination
碩士 === 國立臺灣科技大學 === 機械工程系 === 88 === Using micro-fabrication technology, a miniaturized Thermal Conductivity Detector (TCD) for portable gas chromatography (GC) was successfully fabricated on a two-layered silicon chip. This fabricated Micro-TCD has a three-layer microstructure with two microchannel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55719864467471023136 |