Miniature Planar Nozzles
碩士 === 國立臺灣科技大學 === 機械工程系 === 88 === Presented in this thesis is a preliminary study of miniature planar nozzles - a major component of micron-sized heat engines to be fabricated by the photo lithography technique. Experiments were carried out to assess the feasibility and the pros and co...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2000
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Online Access: | http://ndltd.ncl.edu.tw/handle/54821449522882723093 |